OAEAI?IAeNUeEEE AeA?AEAAIEE OI?AA?NEOAO
Iiiee Oaoyia TH???aia
?iaeaen OAeE 539.186;
539.188
?icn?thaaiiy aeaeo?ii?a iecueeeo aia?a?e iiaa?oiath oaa?aeeo o?e
01.04.04 o?ce/ia aeaeo?ii?ea
A a o i ? a o a ? a o
aeena?oaoe?? ia caeiaoooy iaoeiaiai nooiaiy
eaiaeeaeaoa o?ceei-iaoaiaoe/ieo iaoe
Oaeai?iae 1999
Aeena?oaoe??th ? ?oeiien.
?iaioa aeeiiaia a ?inoeooo? aeaeo?iiii? o?ceee Iaoe?iiaeueii? Aeaaeai??
iaoe Oe?a?ie.
Iaoeiaee ea??aiee: aeieoi? o?ceeiiaoaiaoe/ieo iaoe, i?ioani?
OIAIEE Iooi Aa?oieii?eiae/
?inoeooo aeaeo?iiii? o?ceee IAI Oe?a?ie.
Io?oe?ei? iiiiaioe: aeieoi? o?ceeiiaoaiaoe/ieo iaoe, i?ioani?
III Noaiai Noaiaiiae/
Oaeai?iaenueeee aea?aeaaiee oi?aa?neoao
i?ioani? eaoaae?e eaaioiai? aeaeo?ii?ee;
eaiaeeaeao o?ceeiiaoaiaoe/ieo iaoe, aeioeaio
AIEIAA* Einei Eineiiae/
NEA Cania?a aiae?oe/ii? oaoi?ee, aee?aeoi?.
I?ia?aeia onoaiiaa: ?inoeooo o?ceee IAI Oe?a?ie,
a?aeae?e o?ce/ii? aeaeo?ii?ee, i.Ee?a.
Caoeno a?aeaoaeaoueny “2 “aa?aniy 1999 ?ieo i 14 aiaeei? ia can?aeaii?
Niaoe?ae?ciaaii? a/aii? ?aaee E061.51.01 i?e Oaeai?iaenueeiio
aea?aeaaiiio oi?aa?neoao? ca aae?anith: 294000, i.Oaeai?iae, aoe.
Aieioeia 54, aoae. 181.
C aeena?oaoe??th iiaeia iciaeiieoeny a a?ae?ioaoe? Oaeai?iaenueeiai
aea?aeoi?aa?neoaoo (i.Oaeai?iae, aoe. Eai?ooeueia,9).
Aaoi?aoa?ao ?ic?neaiee “23“/a?aiy 1999 ?ieo.
A/aiee nae?aoa? Niaoe?ae?ciaaii? a/aii? ?aaee
ae.o.i.i., i?ioani?
Aeaoeeai Ae.?.
Caaaeueia oa?aeoa?enoeea ?iaioe
Aeooaeuei?noue i?iaeaie. ?icaeoie no/anii? i?e?iaeaeo?ii?ee, noai?aiiy
i?eioeeiiai iiaeo i?eeaae?a aeiaaa? ciaiue i?i niaoeeo?eo yaeu ?
i?ioean?a, ui a?aeaoaathoueny ia iiaa?oi? ? a i?eiiaa?oiaa?e iaeano?
oaa?aeeo o?e. Noai iiaa?oi? iiaea nooo?ai aieeaaoe ? ia ia’?ii?
aeanoeaino? ?a/iaeie, ia ?iaioo oaa?aeio?eueieo i?eeaae?a. Ca?aene
aeieeaa? aeooaeuei?noue aeine?aeaeaiue aeaiaioa?ieo i?ioean?a, ui
a?aeaoaathoueny ia iiaa?oi? oaa?aeeo o?e i?ae ae??th ??cieo ciai?oi?o
oaeoi??a, cie?aia, i?e ?o aiiaa?aeoaaii? iecueeiaia?aaoe/ieie
aeaeo?iiaie.
Aeaiaioa?i? i?ioeane, ui a?aeaoaathoueny i?e aiiaa?aeoaaii? aeaeo?iiaie
?a/iaeie a eiiaeainiaaiiio noai? a?eueo neeaaei? aeey aea/aiiy ?
?icoi?iiy, i?ae i?ioeane, ui iathoue i?noea i?e aca?iiae?? aeaeo?ii?a c
?a/iaeiith a aacia?e oac?. O oaa?aeiio o?e? ii?yae ?c o?i?/iei neeaaeii
ae??oaeueio ?ieue a?ae?a?athoue ca’ycee i?ae /anoeieaie a?aoee, noai
ciai?oi?o aeaeo?ii?a iieno?oueny a?eueo neeaaeiei /eiii, i?ae a
?cieueiaaiiio aoii? /e iieaeoe?. Oeei iiynith?oueny oa ianoaaeia, ui
oai?aoe/ia iiaeaeue aaeaeaaoiiai iieno i?ioean?a aca?iiae?? iia?eueieo
aeaeo?ii?a c oaa?aeio?eueieie i?oaiyie aei oeeo i?? ia aeinoaoiuei
?icaeiooa. Oiio oae? i?ioeane ia?aaaaeii aeine?aeaeothoueny
aenia?eiaioaeueii. Ia nueiaiaei? ?ic?iaeaii aaaaoi iaoiae?a, ye?
aeei?enoiaothoue a yeino? ciiaea aeaeo?iii? io/ee ??cieo aia?a?e.
Ca’ycie ?iaioe c iaoeiaeie i?ia?aiaie, ieaiaie, oaiaie. ?iaioa, yea
aeeiioaaeanue i?ioyaii 19821998 ?ie?a, ? ?acoeueoaoii o/ano? iiooeoaa/a
o aeeiiaii? oai IAI Oe?a?ie, I?ia?aie AeEIO ? Aea?aeaoaeo N?N?, A?aioo
I?aeia?iaeiiai iaoeiaiai oiiaeo Aeae. Ni?ina.
Iaoa ?iaioe ?ic?iaea o?ce/ieo iniia iaoiaeo cai?ioii ?icn?yieo
aeaeo?ii?a iecueeeo aia?a?e (C?AIA), noai?aiiy oaoi?ee aeey eiai
i?aeoe/ii? ?aae?caoe??, ii?iaoaaiiy iaoiaeo ia i?aaeiao io?eiaiiy
ooiaeaiaioaeueieo oa?aeoa?enoee iiaa?oi? oa ia’?io oaa?aeeo o?e ia
i?eeeaae? aeine?aeaeaiiy aia?aaoe/ieo niaeo??a cai?ioii ?icn?yieo
aeaeo?ii?a iiaa?oiath aeaai?iaeieo iaoae?a, iai?ai?ia?aeiee?a, iaieeaieo
ie?aie oa aaeni?aiaaieo iieaeoe.
Aeey aeinyaiaiiy iinoaaeaii? iaoe iaiao?aeii aoei:
c?a?aoe aenieiaaeooiio nenoaio c aacianeyiith a?aeea/eith ia aaeooi
5 aA. Aia?aaoe/ia iieiaeaiiy iniaeeainoae ia niaeo?ao
i?ioiaeaeaiiy oa ia niaeo?ao i?oaeiiai ? iai?oaeiiai C?AIA aeey BiTeJ i
BiTeBr aeia?a ocaiaeaeothoueny i?ae niaith, a oea icia/a?, ui niaeo?e
?icn?thaaiiy aeaeo?ii?a iecueeeo aia?a?e aeathoue ?ioi?iaoe?th ia
o?eueee i?i aia?aaoe/io no?oeoo?o iiaa?oiaaeo noai?a, aea ? i?i
i?aeciii? ia?aoiaee aeaeo?ii?a a ia’?i? e?enoae?/ieo oaa?aeeo o?e. Aeey
iiyniaiiy aeniei? i?ici?ino? iiiie?enoae?/ieo oiieeo c?ace?a BiTeJ oa
BiTeBr aeey aeaeo?iiieo io/e?a iecueeeo aia?a?e a ?iaio? cai?iiiiiaaii
?aciiainiee iaoai?ci i?ioiaeaeaiiy aeaeo?ii?a /a?ac iioaioe?aeuei?
aa?’??e.
Iiaeeeaino? niaeo?ineii?? C?AIA aoei ai?iaiaaii oeyoii aeine?aeaeaiiy
iaoa??ae?a, aeey yeeo iaee?aua oai?aoe/ii ? aenia?eiaioaeueii aea/aii
iniaeeaino? aeaeo?iiiiai aia?aaoe/iiai niaeo?o o cii? A??eethaia. Na?aae
iai?ai?ia?aeiee?a oaeei aeiiaai, ia iaoo aeoieo, caaeia?eueiythoue
a?nai?ae aae?th oa e?aii?e.
sse a e?enoaeao aeiaco ? e?aii?th, oae ? a a niieoeao AIIIAV oa AIIAVI
?c no?oeoo?ith noaea?eoo ia iaeio aeaiaioa?io eii??eo i?eoiaeeoueny
a?n?i aeaeo?ii?a. Oiio aaeaioia ciia oeeo e?enoae?a neeaaea?oueny ?c
/ioe?ueio iiai?noth caiiaiaieo aeaeo?iiaie aia?aaoe/ieo i?aecii. O an?o
oeeo ?a/iaeiao aa?oeia aaeaioii? ciie ia? neiao??th A15 ? cia/aiiy
aia?a?? iaaeae? aoaeooue a?ae?aoiaoaaoenue a?ae oeueiai noaio. Aeey
e?enoaeo GaAs ciinoa??aa?oueny aeineoue aeia?a ocaiaeaeaiiy i?ae
no?oeoo?ith aeaeo?iiieo niaeo??a ?OAN ? OAN oa oai?aoe/ii ?ic?aoiaaieie
iieiaeaiiyie iniaeeainoae no?oeoo?e aaeaioii? ciie. A?aeiiino? i?i
aia?aaoe/ia iieiaeaiiy iniaeeaeo oi/ie o cii? i?ia?aeiino? oe? iaoiaee
ia aeathoue. Oaeo ?ioi?iaoe?th aeathoue o?eueee niaeo?e C?AIA oa niaeo?e
oa?aeoa?enoe/ieo ao?ao, aea a inoaii?o caeeoa?oueny iaaecia/aiei
aia?aaoe/ia iieiaeaiiy ii/aoeiaiai noaio, ine?eueee aia?a?y iae?oath/eo
aeaeo?ii?a >50 aA. O aeiaaeeo C?AIA i?e aia?a?yo 05 aA iiaeia /?oei
aecia/eoe ii?iaia? cia/aiiy ao?ao aia?a?? ? aeine?aeaeoaaoe ia?aoiaee
aeaeo?ii?a o?eueee ?c aa?oiuei? aaeaioii? ciie, ooai?aii? s- ?
?-i?a?oaeyie, o iaeaeeae/? aenieineiao?e/i? oi/ee ciie i?ia?aeiino?,
?icoaoiaai? ieae/a ??aiy aaeooia. Iniaeeaino? a iaeano? aia?a?e 0,20 aA,
0,30 aA oa 0,500,55 aA iia’ycaii ?c ia?aoiaeaie i?ae ?ic/aieaieie ciiaie
aaaeeeo ? eaaeeo ae??ie (aeey c?ace?a ?-oeio). Iniaeeaino? c aia?a?yie
0,60-0,65 aA, 0,80 aA, 0,95 aA ? 1,15-1,20 aA ? i?aenoaae iia’ycaoe c
aeaeo?iiieie ia?aoiaeaie ?c oi/ee A15 ia iiaa?oiaa? noaie. Ia?aaaaeia
a?eueo?noue iniaeeainoae a niaeo?ao C?AIA aeey GaAs a iaeano? aia?a?e
1,5 aA aeia?a ocaiaeaeo?oueny c oai?aoe/ii ?ic?aoiaaieie aia?aaoe/ieie
u?eeiaie aeey ia?aoiae?a caoaeaeaieo aeaeo?ii?a i?ae aenieineiao?e/ieie
noaiaie aaeaioii? ciie ? ciie i?ia?aeiino?, oi/a ia aeeeth/aii, ui
/anoeia oeeo iniaeeainoae iiaea aooe iaoiiaeaia ia?aoiaeaie ?c IAN,
?icoaoiaaieo ieae/a noae? aaeaioii? ciie, o ciio i?ia?aeiino?.
Iniaeeaino? a niaeo?ao c aia?a?yie a iaeano? 11 aA ? 16 aA ca oi?iith ?
a?aenoaiith i?ae ieie ? i?aenoaae iia’ycoaaoe ?c caoaeaeaiiyi
iiaa?oiaaeo oa ia’?iieo ieaciii?a, a?aeiia?aeii.
Aiaeia?/i? aeine?aeaeaiiy niaeo??a i?oaeii ? iai?oaeii ?icn?yieo
aeaeo?ii?a iaie aeeiiaii ia iiiie?enoaeao GeS, oaa?aeeo ?ic/eiao
GeSxSe1-x oa aii?oieo iai?ai?ia?aeieeao As2S3. Io?eiai? aeey ieo
?acoeueoaoe i?aeoaa?aeaeothoue aeua iaaaaeaia.
E?aii?e ? iaee?auei iiaeaeueiei iaoa??aeii aeey ai?iaaoe?? iiaeo
iaoiaeee oa anoaiiaeaiiy ?o aoaeoeaiino?. Iaie i?iaaaeaii aeine?aeaeaiiy
AC? i?oaeiiai ?icn?thaaiiy, niaeo??a aia?aaoe/ieo ao?ao iai?oaeii
?icn?yieo aeaeo?ii?a oa niaeo??a ?icn?yieo aeaeo?ii?a ?c noaeith
caeeoeiaith aia?a??th (ii?iaiaeo niaeo??a) C?AIA a ae?aiacii? 015 aA
iiaa?oiyie iiiie?enoae?/iiai iaeaaiaaiiai e?aii?th, iiiie?enoae?/iiai
eaaiaaiiai ?oeio e?aii?th EAeA10 (?~1,041017 ni-3), iiiie?enoae?/iiai
e?aii?th ?oeio c ia?iaeaiith iiooaeiei eaca?ii iiaa?oiath (aiaeia?/ii ye
oea ?iaeoueny aeey iaea?aeaiiy ii?enoiai e?aii?th (?E18)), ii?enoiai
e?aii?th, ianeaiaaiiai iieaeoeaie aiaee (Sip+H2O), oaeiai ae e?aii?th,
ianeaiaaiiai ia?aeenii aiaeith (Sip+H2O2), iiiie?enoae?/iiai e?aii?th
EAeA7,5 (?~1,41017 ni-3, Si-p(100)), oeueiai ae e?aii?th c iaianaiith ia
iueiai ie?aeith e?aii?th (Si/Sip(100)), oeueiai ae c?acea, iie?eoiai
oiieei oa?ii Mg (Mg/Si/Sip(100)). ?acoeueoaoe iaea?aeaii ca aeiiiiiaith
a?iioeeeei?aeaeueiiai aeaeo?iiiiai niaeo?iiao?a.
Nii/aoeo iaie aea/aeenue i?ioeane ia iiaa?oi? e?aii?th. Aeey oeueiai
aeei?enoiaoaaeenue aeaeo?iii? io/ee c aia?a?yie 14 aA. Anoaiiaeaii, ui
AC? i?oaeii ?icn?yieo iacaae aeaeo?ii?a neaai /ooeea? aei noaio
aii?yaeeiaaiino? aoii?a ia iiaa?oi?. I?iyaey?oueny aeia?a a?aeiia
caeiiii??i?noue niaaeo ?ioaineaiino? a?aeaeoeo aeaeo?ii?a ?c
ca?eueoaiiyi ?o aia?a??. Ia niaeo?ao aia?aaoe/ieo ao?ao aeey eiaeiiai
noaio iiaa?oi? e?aii?th oiiea no?oeoo?a niinoa??aa?oueny a aeoaea
aocueeeo ?ioa?aaeao aia?a?e iae?oath/eo aeaeo?ii?a A0. Iai?eeeaae, aeey
ii?enoeo c?ace?a Sip(100) i?e A0=1,0 aA a niaeo?ao iayai? aeaa iaeneioie
A1=(0,300,05) aA ? A2=(0,50,05) aA, a i?e A0=1,5 aA A1=(0,300,05) aA ?
A3=(0,800,05) aA. Nooo?aa ci?uaiiy A3 i?e iacia/iiio ca?eueoaii? A0
iaa?yae /e iiaea aooe coiiaeaii ao?aoaie ia iaeiiio e oiio ae
eieaeueiiio oeaio??. A?eueo ?iia??ii, ui ooo i?iyaeythoueny aeaa ??ci?
ca i?e?iaeith IAN, iiia?a/i? ia?a??ce ?icn?thaaiiy yeeo iathoue
?aciiainio caeaaei?noue a?ae A0.
Ia iiaa?oi? (100) ii?enoiai e?aii?th ?oeio, ianeaiaai?e iieaeoeaie I2I
oa I2I2 oiiea no?oeoo?a a niaeo?ao ao?ao aia?a?? niinoa??aa?oueny i?e
a?eueo aenieeo A0. A i?e aeae?ey?oueny o?eueee iaeei iaeneioi c
A1=(0,350,05) aA, yeee iiaeia ioioiaeieoe c A1 aeey /enoi? iiaa?oi? Sip.
Ni?aoe?y iacia/ii ci?uo? A1, aea iiai?noth iaeo?ae?co? i?iya o niaeo?ao
iniaeeainoae c aia?a?yie A2=(0,500,05) aA oa A3=(0,800,05) aA.
Aiaeia?/i? ?acoeueoaoe iaea?aeaii ia niaeo?ao iino?eieo caeeoeiaeo
aia?a?e aeaeo?ii?a. Oiiea no?oeoo?a a oeeo niaeo?ao ia /eno?e (100)
iiaa?oi? Sip i?iyaey?oueny i?e caeeoeia?e aia?a?? ?icn?yieo aeaeo?ii?a
Ar=(0,20,4) aA, a ia iiaa?oi? (100) Sip+H2O i?e Er=1,0 aA. Aeaeii, ui
oa?aeoa? iniaeeainoae a niaeo?ao a iaeano? aia?a?e (01,0) aA iineoue
/?oei ae?aaeaio ?aciiainio i?e?iaeo.
A?aeiii, ui aaeni?aoe?y iieaeoe aieeaa? ia IAN a?ia?ao?/ii? i?e?iaee.
Aoei oe?eaai anoaiiaeoe, /e iiaeeeai niaeo?ineii??th C?AIA
aeine?aeaeoaaoe noai naieo aaeni?aiaaieo iieaeoe. Ia’?eoii aeey
ai?iaaoe?? iaoiaeeee a oeueiio aniaeo? neoaoaaea aaeni?aiaaia iieaeoea
N2, ?aciiain yei? N2- (2Ig) ia? a?aeiinii aaeeeee aoaeoeaiee ia?a??c
cai?ioiiai ?icn?thaaiiy aeaeo?ii?a iecueeeo aia?a?e. Ia iiaa?oi?
Sip(100) a niaeo?ao iino?eieo caeeoeiaeo aia?a?e ae?enii i?iyaeeeny
iniaeeaino? a iaeano? aia?a?e (1,72,1) aA, ye? ca oi?iith ? ca
a?aeiiniei aia?aaoe/iei iieiaeaiiyi iaeneioi?a a?aeiia?aeathooue
caoaeaeaiith 2Ig ?aciiainiiai noaio iieaeoee N2.
C’ynoaaeiny, ui ia o?eueee caoaeaeaiiy aeaeo?ii?a ia (/e ?c) IAN
iineoue ?aciiainiee oa?aeoa?, aea ? i?aeciii? ia?aoiaee aeaeo?ii?a
oaeiae aeoaea /ooeea? aei aia?a?? caoaeaeoth/eo aeaeo?ii?a. Oiio,
i?aeaeuoth/e aia?a?th ia?aeiieo aeaeo?ii?a, ie iia??oo?ii i?iya oiiei?
no?oeoo?e a niaeo?ao a iaeano? ieae/eo aia?a?e. A i??o c?inoaiiy aia?a??
iae?oath/eo aeaeo?ii?a a?ae 0 aei 10 aA, iii?oii ciaioo?oueny aeeaeia
i?iieeiaiiy ia?aeiieo aeaeo?ii?a, a oea icia/a?, ui iineaaeth?oueny
aianie i?aeciiieo ia?aoiae?a a ia’?i? c?acea ii??aiyii ?c aeeaaeii
ia?aoiae?a aeaeo?ii?a a oiie?e i?eiiaa?oiaa?e iaeano?. Oiio ia aeeaii,
ui a caeaaeiino? a?ae A0 iaei? e o? ae iniaeeaino? a niaeo?ao
i?iyaeythoueny ii ??ciiio, a aeaye? c ieo iiaeooue ? cian?i cieeiooe.
Oiio aeey iaae?eiino? aeine?aeaeaiiy aeaiaioa?ieo i?ioean?a, iaoiiaeaieo
aca?iiae??th ia?aeiieo aeaeo?ii?a c aeaeo?iiiith i?aenenoaiith oaa?aeeo
o?e a ?ioa?aae? aia?a?e (010) aA c aenieei aia?aaoe/iei ?icae?eaiiyi
aeioe?eueii aea/aoe an? o?e oeie niaeo??a C?AIA.
Aeey c?o/iino? aiae?co oa ?ethno?aoe?? a?aeoai?thaaiino? iniaeeainoae a
niaeo?ao ii-??ciiio i?eaioiaaieo iiaa?oiiue, aeai? i?i iniaeea? oi/ee a
oeeo niaeo?ao caaaeaii a Oaaeeoe?. ?c iaea?aeaieo ?acoeueoao?a ne?aeo?,
ui aia?aaoe/ia iieiaeaiiy iniaeeainoae a ??cieo niaeo?ao aeia?a i?ae
niaith ocaiaeaeaia, ?o na?aaei? cia/aiiy ??ciyoueny i?ae niaith a iaaeao
?icae?eueii? caeaoiino? i?eeaaeo, yea o aeiaaeeo ?icn?thaaiiy ia
iiaa?oi? e?aii?th neeaaeaea aaee/eio
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